Supported File Formats

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Supported File Formats
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Supported File Formats

File Format	Extensions	Module	Read	Write	SPS	Volume	Curve map
Accurion ASCII exported scanning ellipsometry	.txt	accurell	Yes	—	—	—	—
Accurex II text data	.txt	accurexii-txt	Yes	—	—	—	—
AFM Workshop spectroscopy	.csv	afmw-spec	—	—	Yes	—	—
AIST-NT	.aist	aistfile	Yes	—	—	—	—
Alicona Imaging AL3D data	.al3d	alicona	Yes	—	—	—	—
Ambios AMB	.amb	ambfile	Yes ^[a]	—	—	—	—
Ambios 1D profilometry data	.dat, .xml	ambprofile	Yes	—	—	—	—
Analysis Studio XML	.axd, .axz	anasys_xml	Yes	—	Yes	—	—
Anfor SIF	.sif	andorsif	Yes ^[a]	—	—	—	—
Anfatec	.par, .int	anfatec	Yes	—	—	—	Yes
A.P.E. Research DAX	.dax	apedaxfile	Yes	—	—	—	—
A.P.E. Research APDT	.apdt	apedaxfile	Yes	—	—	—	—
A.P.E. Research DAT	.dat	apefile	Yes	—	—	—	—
Asylum Research ARDF	.ardf	ardf	Yes	—	—	Yes	—
Text matrix of data values	.txt	asciiexport	—	Yes	—	—	—
ASD high-speed AFM files	.asd	asdfile	Yes	—	—	—	—
Assing AFM	.afm	assing-afm	Yes	Yes	—	—	—
Attocube Systems ASC	.asc	attocube	Yes	—	—	—	—
Image Metrology BCR, BCRF	.bcr, .bcrf	bcrfile	Yes	—	—	—	—
Burleigh BII	.bii	burleigh_bii	Yes	—	—	—	—
Burleigh IMG v2.1	.img	burleigh	Yes	—	—	—	—
Burleigh exported data	.txt, .bin	burleigh_exp	Yes	—	—	—	—
Code V interferogram data	.int	codevfile	Yes	—	—	—	—
Createc DAT	.dat	createc	Yes	—	—	—	—
Benyuan CSM	.csm	csmfile	Yes	—	—	—	—
Dektak OPDx profilometry data	.OPDx	dektakvca	Yes	—	—	—	—
Dektak XML profilometry data	.xml	dektakxml	Yes	—	—	—	—
Veeco Dimension 3100D	.001, .002, etc.	dimensionfile	Yes ^[a]	—	—	—	—
Digital Micrograph DM3 TEM data	.dm3	dm3file	Yes	—	—	—	—
Digital Micrograph DM4 TEM data	.dm4	dm3file	Yes	—	—	—	—
DME Rasterscope	.img	dmefile	Yes	—	—	—	—
Gwyddion dumb dump data	.dump	dumbfile	Yes	—	—	—	—
ECS	.img	ecsfile	Yes	—	—	—	—
Evovis XML profilometry data	.xml	evovisxml	Yes	—	—	—	—
Nanosurf EZD, NID	.ezd, .nid	ezdfile	Yes	—	—	—	—
FemtoScan SPM	.spm	femtoscan	Yes	—	—	—	—
FemtoScan text data	.txt	femtoscan-txt	Yes ^[b]	—	—	—	—
Flexible Image Transport System (FITS)	.fits, .fit	fitsfile	Yes	—	—	—	—
VTK structured grid file	.vtk	formats3d	—	Yes	—	—	—
PLY 3D Polygon File Format	.ply	formats3d	—	Yes	—	—	—
Wavefront OBJ 3D geometry	.obj	formats3d	Yes	Yes	—	—	—
Object File Format 3D geometry	.off	formats3d	—	Yes	—	—	—
Stereolitography STL 3D geometry (binary)	.stl	formats3d	Yes	Yes	—	—	—
XYZ data	.xyz, .dat	formats3d	Yes	Yes	—	—	—
DME GDEF	.gdf	gdeffile	Yes	—	—	—	—
Gwyddion Simple Field	.gsf	gsffile	Yes	Yes	—	—	—
Gwyddion native data	.gwy	gwyfile	Yes	Yes	Yes	Yes	—
Gwyddion XYZ data	.gxyzf	gxyzffile	Yes	Yes	—	—	—
Psi HDF4	.hdf	hdf4file	Yes	—	—	—	—
Hitachi AFM	.afm	hitachi-afm	Yes	—	—	—	—
Hitachi S-3700 and S-4800 SEM data	.txt + image	hitachi-sem	Yes	—	—	—	—
WaveMetrics IGOR binary wave v5	.ibw	igorfile	Yes	Yes	—	—	—
WaveMetrics IGOR Packed files	.pxp	igorfile	Yes	—	—	—	—
IntelliWave ESD	.esd	intelliwave	Yes	—	—	—	—
Intematix SDF	.sdf	intematix	Yes	—	—	—	—
ISO 28600:2011 SPM data transfer format	.spm	iso28600	Yes	Yes	Limited ^[c]	—	—
JEOL	.tif	jeol	Yes	—	—	—	—
JEOL TEM image	.tif	jeoltem	Yes ^[a]	—	—	—	—
JPK Instruments	.jpk, .jpk-qi-image, .jpk-force, .jpk-force-map, .jpk-qi-data	jpkscan	Yes	—	Yes	—	Yes
JEOL JSPM	.tif	jspmfile	Yes	—	—	—	—
Keyence profilometry VK3, VK4, VK6, VK7	.vk3, .vk4, .vk6, .vk7	keyence	Yes	—	—	—	—
Leica LIF Data File	.lif	leica	Yes	—	—	Yes	—
Olympus LEXT 4000	.lext	lextfile	Yes	—	—	—	—
FEI Magellan SEM images	.tif	magellan	Yes	—	—	—	—
MapVue	.map	mapvue	Yes	—	—	—	—
Matlab MAT 5 files	.mat	matfile	Yes	—	—	—	—
Zygo MetroPro DAT	.dat	metropro	Yes	—	—	—	—
MicroProf TXT	.txt	microprof	Yes	—	—	—	—
MicroProf FRT	.frt	microprof	Yes	—	—	—	—
DME MIF	.mif	miffile	Yes	—	—	—	—
Molecular Imaging MI	.mi	mifile	Yes	—	Limited ^[c]	—	Yes
Aarhus MUL	.mul	mulfile	Yes	—	—	—	—
Nanoeducator	.mspm, .stm, .spm	nanoeducator	Yes	—	Yes	—	—
Nanomagnetics NMI	.nmi	nanomagnetics	Yes	—	—	—	—
Nanonics NAN	.nan	nanonics	Yes	—	—	—	—
Nanonis SXM	.sxm	nanonis	Yes	—	—	—	—
Nanonis STS spectroscopy	.dat	nanonis-spec	—	—	Yes	—	—
Nano-Solution/NanoObserver	.nao	nanoobserver	Yes	—	Yes	—	—
Nanoscan XML	.xml	nanoscan	Yes	—	—	—	—
NanoScanTech	.nstdat	nanoscantech	Yes	—	Yes	Yes	—
Veeco Nanoscope III	.spm, .001, .002, etc.	nanoscope	Yes	—	Limited ^[c]	Yes	Yes
Veeco Nanoscope II	.001, .002, etc.	nanoscope-ii	Yes	—	—	—	—
NanoSystem profilometry	.spm	nanosystemz	Yes	—	—	—	—
Nanotop SPM	.spm	nanotop	Yes	—	—	—	—
GSXM NetCDF	.nc	netcdf	Yes	—	—	—	—
Nano Measuring Machine profile data	.dsc + .dat	nmmxyz	Yes ^[d]	—	—	—	—
Nova ASCII	.txt	nova-asc	Yes	—	—	—	—
Numpy binary serialised array	.npy	npyfile	Yes	—	—	—	—
Multiple numpy binary serialised arrays	.npz	npyfile	Yes	—	—	—	—
Nearly raw raster data (NRRD)	.nrrd	nrrdfile	Yes ^[e]	Yes ^[f]	—	Yes	—
NT-MDT	.mdt	nt-mdt	Yes	—	Yes	Yes	—
EM4SYS NX II	.bmp	nxiifile	Yes	—	—	—	—
Olympus OIR	.oir	oirfile	Yes	—	—	—	—
Olympus packed OIR	.poir	oirfile	Yes	—	—	—	—
NT-MDT old MDA	.sxml + .dat	oldmda	—	—	—	Yes	—
Olympus LEXT 3000	.ols	ols	Yes	—	—	—	—
Open Microscopy OME TIFF	.ome.tiff, .ome.tif	ometiff	Yes	—	—	—	—
Omicron SCALA	.par + .tf, .tb, .sf, .sb	omicron	Yes	—	Yes	—	—
Omicron flat format	.*_flat	omicronflat	Yes	—	—	—	—
Omicron MATRIX	.mtrx	omicronmatrix	Yes	—	Limited ^[c]	Yes	—
Wyko OPD	.opd	opdfile	Yes	—	—	—	—
Wyko ASCII	.asc	opdfile	Yes	—	—	—	—
OpenGPS X3P (ISO 5436-2)	.x3p	opengps	Yes	—	—	—	—
NASA Phoenix Mars mission AFM data	.dat, .lbl + .tab	phoenix	Yes	—	—	—	—
Pixmap images	.png, .jpeg, .tiff, .tga, .pnm, .bmp	pixmap	Yes ^[g]	Yes ^[h]	—	—	—
Nanosurf PLT	.plt	pltfile	Yes	—	—	—	—
Pacific Nanotechnology PNI	.pni	pnifile	Yes	—	—	—	—
Princeton Instruments camera SPE	.spe	princetonspe	Yes	—	—	—	—
Park Systems	.tiff, .tif	psia	Yes	—	—	—	—
Park Systems PS-PPT	.ps-ppt	psppt	Yes	—	—	—	Yes
SymPhoTime TTTR v2.0 data	.pt3	pt3file	Yes	—	—	—	—
Quazar NPIC	.npic	quazarnpic	Yes ^[a]	—	—	—	—
Quesant AFM	.afm	quesant	Yes	—	—	—	—
Raw text files	any	rawfile	Yes	—	—	—	—
Raw binary files	any	rawfile	Yes	—	—	—	—
Graph text data (raw)	any	rawgraph	Yes ^[i]	—	—	—	—
Renishaw WiRE Data File	.wdf	renishaw	Yes	—	Yes	Yes	—
RHK Instruments SM3	.sm3	rhk-sm3	Yes	—	Limited ^[c]	—	—
RHK Instruments SM4	.sm4	rhk-sm4	Yes	—	Limited ^[c]	—	—
RHK Instruments SM2	.sm2	rhk-spm32	Yes	—	Limited ^[c]	—	—
Automation and Robotics Dual Lens Mapper	.mcr, .mct, .mce	robotics	Yes	—	—	—	—
S94 STM files	.s94	s94file	Yes	—	—	—	—
Cyber technologies SCAN data	.scan	scanfile	Yes	—	—	—	—
Cyber technologies SCNX data	.scnx	scnxfile	Yes	—	—	—	—
Surfstand Surface Data File	.sdf	sdfile	Yes	Yes	—	—	—
Micromap SDFA	.sdfa	sdfile	Yes	—	—	—	—
Seiko SII	.xqb, .xqd, .xqt, .xqp, .xqj, .xqi	seiko	Yes	—	—	—	—
Sensofar PLu	.plu, .apx	sensofar	Yes	—	—	—	—
Sensofar PLUx data	.plux	sensofarx	Yes	—	—	—	—
Sensolytics DAT	.dat	sensolytics	Yes	—	—	—	Yes
Shimadzu	.sph, .spp, .001, .002, etc.	shimadzu	Yes	—	—	—	—
Shimadzu ASCII	.txt	shimadzu	Yes	—	—	—	—
IonScope SICM	.img	sicmfile	Yes	—	—	—	—
Surface Imaging Systems	.sis	sis	Yes	—	—	—	—
Thermo Fisher SPC File	.spc	spcfile	—	—	Yes	—	—
SPIP ASCII	.asc	spip-asc	Yes	Yes	—	—	—
Thermicroscopes SPMLab R4-R7	.tfr, .ffr, etc.	spmlab	Yes	—	—	—	—
Thermicroscopes SPMLab floating point	.flt	spmlabf	Yes	—	—	—	—
SPML (Scanning Probe Microscopy Markup Language)	.xml	spml	Yes	—	—	—	—
ATC SPMxFormat data	.spm	spmxfile	Yes	—	—	—	—
Omicron STMPRG	tp, ta	stmprg	Yes	—	—	—	—
Molecular Imaging STP	.stp	stpfile	Yes	—	—	—	—
Surf	.sur	surffile	Yes	—	—	—	—
Tescan MIRA SEM images	.tif	tescan	Yes	—	—	—	—
Tescan LYRA SEM images	.hdr + .png	tescan	Yes	—	—	—	—
FEI Tecnai imaging and analysis (former Emispec) data	.ser	tiaser	Yes	—	Yes	Yes	—
Corning Tropel UltraSort topograhpical data	.ttf	ttffile	Yes	—	—	—	—
Corning Tropel exported CSV data	.csv	ttffile	Yes	—	—	—	—
Unisoku	.hdr + .dat	unisoku	Yes	—	—	—	—
WinSTM data	.stm	win_stm	Yes	—	—	—	—
WITec Project data	.wip	wipfile	Yes	—	Yes	Yes	—
WITec ASCII export	.dat	witec-asc	Yes	—	—	—	—
WITec	.wit	witfile	Yes	—	—	—	—
Department of Nanometrology, WRUST	.dat	wrustfile	Yes	—	—	—	—
AFM Workshop data	.wsf	wsffile	Yes	—	—	—	—
Nanotec WSxM	.tom, .top, .stp	wsxmfile	Yes	Yes	—	—	—
Nanotec WSxM curves	.cur	wsxmfile	Yes	—	—	—	—
Carl Zeiss SEM scans	.tif	zeiss	Yes	—	—	—	—
Carl Zeiss CLSM images	.lsm	zeisslsm	Yes	—	—	Yes	—
Zemax grid sag data	.dat	zemax	Yes	—	—	—	—
KLA Zeta profilometry data	.zmg	zmgfile	Yes	—	—	—	—
Keyence ZON data	.zon	zonfile	Yes	—	—	—	—
ZyVector Scanz	.zad	zyvex	Yes	—	—	—	—
OpenEXR images	.exr	hdrimage	Yes	Yes	—	—	—
Zygo DATX HDF5	.datx	datxfile	Yes	—	—	—	—
EPFL HDF5	.h5	epflfile	Yes	—	—	—	—
Asylum Research Ergo HDF5	.h5,.aris	ergofile	Yes	—	—	—	—
Generic HDF5 files	.h5	hdf5file	Yes	—	—	—	—
Matlab MAT 7.x files	.mat	hdf5file	Yes	—	—	—	—
Nanosurf NHF	.nhf	nhffile	Yes	—	—	—	—
N-Dimensional Spectroscopy and Imaging Data (NSID) HDF5	.h5	nsidfile	Yes	—	—	—	—
Shilps Sciences Lucent HDF5	.h5	shilpsfile	Yes	—	Yes	Yes	Yes
^[a] The import module is unfinished due to the lack of documentation, testing files and/or people willing to help with the testing. If you can help please contact us. ^[b] Regular sampling in both X and Y direction is assumed. ^[c] Spectra curves are imported as graphs, positional information is lost. ^[d] XYZ data are interpolated to a regular grid upon import. ^[e] Not all variants are implemented. ^[f] Data are exported in a fixed attached native-endian float point format. ^[g] Import support relies on Gdk-Pixbuf and hence may vary among systems. ^[h] Usually lossy, intended for presentational purposes. 16bit grayscale export is possible to PNG, TIFF and PNM. ^[i] At present, only simple two-column data, imported as graph curves, are supported.

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