【引用本文】 李旭，张冉，张明宇，等. 透射电子显微镜校准方法[J]. 计量科学与技术，2021, 65（4）：40-44, 18 doi: 10.3969/j.issn.2096-9015.2021.04.08 引用本文: 【引用本文】 李旭，张冉，张明宇，等. 透射电子显微镜校准方法[J]. 计量科学与技术，2021, 65（4）：40-44, 18 doi: 10.3969/j.issn.2096-9015.2021.04.08 LI Xu, ZHANG Ran, ZHANG Mingyu, GENG Yongfeng, ZHANG Yi, GAO Huifang, REN Lingling. The Calibration Method of Transmission Electron Microscope[J]. Metrology Science and Technology, 2021, 65(4): 40-44, 18. doi: 10.3969/j.issn.2096-9015.2021.04.08 Citation: LI Xu, ZHANG Ran, ZHANG Mingyu, GENG Yongfeng, ZHANG Yi, GAO Huifang, REN Lingling. The Calibration Method of Transmission Electron Microscope[J]. Metrology Science and Technology , 2021, 65(4): 40-44, 18. doi: 10.3969/j.issn.2096-9015.2021.04.08 【引用本文】 李旭，张冉，张明宇，等. 透射电子显微镜校准方法[J]. 计量科学与技术，2021, 65（4）：40-44, 18 doi: 10.3969/j.issn.2096-9015.2021.04.08 引用本文: 【引用本文】 李旭，张冉，张明宇，等. 透射电子显微镜校准方法[J]. 计量科学与技术，2021, 65（4）：40-44, 18 doi: 10.3969/j.issn.2096-9015.2021.04.08 LI Xu, ZHANG Ran, ZHANG Mingyu, GENG Yongfeng, ZHANG Yi, GAO Huifang, REN Lingling. The Calibration Method of Transmission Electron Microscope[J]. Metrology Science and Technology, 2021, 65(4): 40-44, 18. doi: 10.3969/j.issn.2096-9015.2021.04.08 Citation: LI Xu, ZHANG Ran, ZHANG Mingyu, GENG Yongfeng, ZHANG Yi, GAO Huifang, REN Lingling. The Calibration Method of Transmission Electron Microscope[J]. Metrology Science and Technology , 2021, 65(4): 40-44, 18. doi: 10.3969/j.issn.2096-9015.2021.04.08 研究了透射电镜放大倍率校准用标准物质及其溯源路径，进行了透射电镜放大倍率及污染率/漂移率校准方法和校准结果不确定度评定，可为透射电镜在科学研究和生产应用中测量结果提供准确可靠的校准方法。 透射电子显微镜 /  放大倍率 /  标准物质 /  校准 / Abstract: In this paper, reference materials for transmission electron microscope (TEM) magnification calibration and their traceability were studied, and the TEM magnification and contamination/drift rate calibration methods and uncertainty evaluation of calibration results were carried out. This study can provide an accurate and reliable calibration method for measuring the results of TEM in scientific research and industrial applications. Key words: transmission electron microscope /  magnification /  reference material /  calibration /  uncertainty  Kadavanich A V, Kippeny T C, Erwin M M, et al . Sublattice Resolution Structural and Chemical Analysis of Individual CdSe Nanocrystals Using Atomic Number Contrast Scanning Transmission Electron Microscopy and Electron Energy Loss Spectroscopy[J]. The Journal of Physical Chemistry B, 2001, 105(2): 361-369. doi: 10.1021/jp002974j 齐笑迎, 贺蒙. 高角环形暗场成像方法测定负载型纳米贵金属催化剂的粒径[J]. 电子显微学报2011, 030(003): 191-194. Anderson S C, Birkeland C R, Anstis G R, et al . An approach to quantitative compositional profiling at near-atomic resolution using high-angle annular dark field imaging[J]. Ultramicroscopy, 1997, 69(2): 83-103. doi: 10.1016/S0304-3991(97)00041-7 Mccaffrey J P, Baribeau J M. A transmission electron microscope (TEM) calibration standard sample for all magnification, camera constant, and image/diffraction pattern rotation calibrations[J]. Microscopy Research and Technique, 1995, 32(5): 449-454. doi: 10.1002/jemt.1070320507 周剑雄, 陈振宇. 用于扫描电镜图像放大倍率校准的三个微米级栅网图形标准样板的研究[J]. 电子显微学报, 2005, 024(003): 185-191. 钱进, 石春英, 谭慧萍, 等. 利用一维光栅标样校准扫描电子显微镜方法的研究[J]. 计量学报, 2010, 31(4): 299-302. doi: 10.3969/j.issn.1000-1158.2010.04.03 Grogger W, Schaffer B, Krishnan K M, et al . Energy-filtering TEM at high magnification: Spatial resolution and detection limits[J]. Ultramicroscopy, 2003, 96(3-4): 481-489. doi: 10.1016/S0304-3991(03)00110-4