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Trace Element Detection

X-ray analysis is more sensitive towards trace elements, allowing their detection at concentrations down to as low as 10 ppm for certain elements, an extended X-ray spectral range (up to 40 keV), as well as information from a greater depth within the sample.

Elemental Mapping with Small Spot Sizes

QUANTAX micro-XRF is equipped with XTrace 2, our latest X-ray source, including a micro-focusing X-ray optic that yields small spot sizes of down to 10 µm at a high-intensity throughput.

Multilayer Sample Analysis

The larger depth of X-ray excitation allows for the characterization of multilayer samples from 1 nm up to 40 µm, which is not possible via electron beam excitation.

Achieve a more comprehensive analysis - Augmenting SEM EDS with micro-XRF provides users with dual beam potential, allowing samples to be even simultaneously analyzed using an electron beam and an X-ray beam.

See more elements - Light elements (carbon to sodium) are excited via the electron beam, whereas heavier elements are excited via the X-ray beam.

One measurement for two spectra - EDS and micro-XRF acquisition take place in the same detector, incorporating light element spectral data as well as trace elements with higher energy X-ray data.

Collect cleaner data - Well-separated peaks and an extended spectral range enable the seperation of high energy K- lines since they are less complex and less overlapped.

Save time - no or minimum sample preparation required without the need for a conductive sample surface and/or extensive polishing.

QUANTAX Micro-XRF provides the tools a user needs to conduct micro-XRF analysis within their scanning electron microscope. The system consists of:

An XTrace 2 50 kV X-ray source

ESPRIT software for data processing and analysis

An XFlash ^® EDS detector for high-intensity throughput analysis with extended energy range (existing on SEM or purchased seperately)

Rapid Stage for high-speed elemental mapping (optional)

XTrace 2 is the next-generation X-ray source in the QUANTAX micro-XRF system for micro-XRF on SEM (SEM XRF). This new and innovative X-ray source enables fast micro-XRF spectral acquisition with high-resolution data.

Advanced features, such as a FlexiSpot mode, an Aperture Management System, and motorized filter selection facilitate the collection of rich data from even challenging samples.

Collect accurate elemental data quickly and efficiently with high-energy X-rays of 50 kV and beam currents of 1000 µA for a high count rate.

Detection of trace elements at low ppm levels with automatic switching between 6 primary filters for enhanced background reduction.

Scan topographic samples in high resolution using an Aperture Management System (AMS) that keeps the image in focus across a variable working distance.

Analyze inhomogeneous and/or irregular samples using FlexiSpot mode, allowing spectral measurements from a small to a larger spot size.

Retract the X-ray optic when not needed by using a motorized linear stage with automatic source retraction (measuring and parking position).

Return to areas of interest on your sample by saving measurement positions for correlating micro-XRF / e-beam analysis .

Maximize X-ray tube lifetime with by automatic X-ray tube warm-up procedure .

Control the analysis, select filters, and move the linear stage using the intuitive ESPRIT software .

XTrace 2 is equipped with the patent protected AMS to retain X-ray spot resolution even when scanning samples with a complex topography in the scanning electron microscope.

The AMS in XTrace 2 keeps the optic in focus at varying working distances by increasing the depth of field. This means that any reduction in resolution due to deviations in the working distance will be minimized, facilitating the high-resolution elemental mapping of highly topographical samples and their 3D features.

FlexiSpot allows users to not only take measurements from small spot sizes (10 μm, 35 μm) but also a range of larger spot sizes (50 - 500 μm). FlexiSpot works by retracting the X-ray source, allowing the X-ray optic to be defocused out of the nominal optic working distance. Users can select between spot sizes using the automated process in our ESPRIT software.

The ability to measure larger spot sizes allows for a more precise quantification of non-homogeneous and irregular shaped samples, as well as samples with uneven surfaces, such as powders. A large spot area provides more statistically accurate data on a sample's composition in just one measurement.

The new XTrace 2 comes with 6 primary filters allows the user to adapt the background over the whole energy range up to 40 keV for further improved sensitivity.

Additional filtering allows for the reduction of the background for specific measurements at energies up to 40 keV. Primary filters can be selected via our ESPRIT software.

The status (open/close) of the SEM load lock chamber can be integrated in the XTrace 2 security circuit - this safety feature ensures that the X-ray shutter cannot be opened when the load lock chamber is open, keeping users safe from X-ray exposure. The advanced safety interlock is designed to work with various SEM models.

Rapid Stage is a modular piezo-based stage, specially designed to mount on top of the existing SEM stage, enabling high-speed elemental X-ray mapping “on the fly” over large areas with up to a speed of 4 mm/s.

The use of Rapid Stage allows for the acquisition of X-ray mapping data over a sample size of 50 x 50 mm (or higher), incorporating light element spectral data as well as trace element and/ or higher energy X-ray data in a fast and user-friendly workflow.

Both XTrace 2 and Rapid Stage are seamlessly integrated in ESPRIT software .

Identification and Determination of Ore Elements at Trace Levels

Detailed elemental mapping using micro-XRF on SEM (also known as SEM XRF) can used to quickly identify the elements present in ore samples and to determine their distribution. The sensitivity of micro-XRF on SEM allows trace elements, penalty elements and elements that complicate processing to be identified.

Analyze Ores with SEM XRF

Fast Elemental Mapping of Electronic Components in a PCB

Elemental mapping of a PCB can be achieved without any sample preparation using high-speed micro-XRF on SEM, a technique that is able to determine the elements in electronic components at trace levels - this is especially useful for the recovery of valuable elements from used electronic components.

Analyze Electronics with SEM XRF

Exploring Elemental Information in A Credit Card Chip without Sample Prep

In this study, a common credit card chip was investigated for its elemental composition information via SEM EDS and micro-XRF on SEM. This combination allows for the elemental mapping of features both on and below the sample surface.

Map below the sample surface with SEM XRF

Elemental and Mineral distribution in Exotic-Cu Deposits

The ability to observe elemental changes within samples is important to understand geological processes and ore deposit genesis. The dual source system which incorporates a micro-XRF on a SEM enables elemental X-ray mapping over large areas, which shows major, minor and also trace elements on the ppm scale.

Large Area Mapping of Mineralogical Samples

The new Rapid Stage is specifically designed for SEMs to enable large area mapping over millimeter (mm) to centimeter (cm) scales. This will eliminate potential SEM X-ray intensity variation artifacts associated with low magnification mapping and thus enhance elemental and mineralogical information in a timeous manor that was previously not possible.

Mantle Petrology and the Source of Diamonds

We present a SEM-XRF element map of a mantle garnet-spinel peridotite from the diamond-bearing Newlands kimberlite (South Africa, Kaapvaal Craton). The intensity of the various elements indicates certain minerals that are present in the sample.

Dual Source Applications for Exploration and Mining: Au-bearing Epithermal Samples

The combination of micro-XRF with SEM enables the potential to analyze samples at multiple scales, from centimeters (cm) to millimeters (mm) to micrometers (µm) and below within a solitary system. Thus, by adding the micro-XRF to an SEM you convert your SEM to a dual source system, meaning that there are 2 excitations sources, the e-beam and photon beam. Either source can be used individually, or simultaneously, to generate sample X-rays that will be measured using the same EDS detector.

Identification of Contaminants and Toxins in Soils

Large Area Mapping (Hypermaps) using SEM-XRF can be performed on samples with topography. That is, minimal sample preparation is required and the sample can be analyzed directly without any degredation. This is particularly relevant in the analysis of soils, where any form of sample preparation, such as mounting and polishing or carbon coating, may alter the specimen.

Thin Film Analysis with SEM micro-XRF

As X-rays may pass through matter, X-ray Fluorescence (XRF) allows the determination of layer thickness. Using micro-XRF on SEM, the layer analysis (thickness and composition) is rendered feasible with spatial resolution at the micrometer scale. Layer analysis is strongly based on quantification using atomic fundamental parameter (FP).